Apparatus and process for producing a crystal of semiconductor material
AssigneeSiltronic AG
InventorsGeorg Brenninger, Georg Raming
Life of this patent
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AssigneeSiltronic AG
InventorsGeorg Brenninger, Georg Raming
Estimating the term…
A crystal of semiconductor material is produced in an apparatus having a crucible with a crucible bottom and a crucible wall, the crucible bottom having a top surface, an underside, and a multitude of openings disposed between the crucible wall and a center of the crucible bottom, and elevations disposed on the top surface and the underside of the crucible bottom; and an induction heating coil disposed below the crucible for melting semiconductor material and stabilizing a melt of semiconductor material covering a growing crystal of semiconductor material. The growth process comprises generating a bed of a semiconductor material feed on the top surface of the crucible bottom and melting semiconductor material on the bed using the induction heating coil.
An apparatus for producing a crystal of semiconductor material, comprising
A process for producing a crystal of semiconductor material, comprising
Dependencies are inferred from the claim text.