Vacuum pump with abatement function

A vacuum pump with abatement function, comprising:

• a vacuum pump having a discharge port;
• and
• at least one abatement part for treating an exhaust gas discharged from the vacuum pump to make the exhaust gas harmless, the at least one abatement part directly attached to the discharge port of the vacuum pump, the at least one abatement part comprising:
• a cylindrical member having a substantially cylindrical container shape with a closed end and an open opposite end, wherein the cylindrical member has a single combustion chamber therein, an exhaust gas introduction port formed in the closed end and configured to introduce the exhaust gas to be treated into the single combustion chamber, and a gas outlet port formed in the open opposite end and configured to discharge gases which have been treated from the single combustion chamber,
• a plurality of fuel nozzles provided in a circumferential wall of the cylindrical member and configured to eject a fuel, and
• a plurality of air nozzles provided in the circumferential wall of the cylindrical member and configured to eject air so as to form a swirling flow of air along an inner circumferential surface of the circumferential wall, the plurality of air nozzles provided in the circumferential wall of the cylindrical member being disposed at a plurality of stages spaced in an axial direction of the cylindrical member,
• wherein the plurality of fuel nozzles, and the plurality of air nozzles disposed at the plurality of stages are spaced in the axial direction of the cylindrical member so that the fuel ejected from the plurality of fuel nozzles and the air ejected from the plurality of air nozzles are mixed and ignited to form swirling flames in the single combustion chamber along the inner circumferential surface of the cylindrical member, and the exhaust gas introduced from the exhaust gas introduction port is mixed with the swirling flames and is treated by combustion in the single combustion chamber.