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US 9,820,390 B2Granted
Process for forming a semiconductor device substrate
AssigneeIntel Corporation
InventorsMihir K. Roy, Islam A. Salama, Yonggang Li
Life of this patent
Estimating the term…
Abstract
A semiconductor device substrate includes a front section and back section that are laminated cores disposed on a front- and back surfaces of a first core. The first core has a cylindrical plated through hole that has been metal plated and filled with air-core material. The front- and back sections have laser-drilled tapered vias that are filled with conductive material and that are coupled to the plated through hole. The back section includes an integral inductor coil that communicates to the front section. The first core and the laminated-cores form a hybrid-core semiconductor device substrate with an integral inductor coil.
Claims20
A process of forming a semiconductor device substrate, comprising:
- forming a first core with a front surface and a back surface, and including an air core plated through hole (PTH) and front- and back PTH conductive pads in contact with the air core PTH;
- and
- forming a laminated-core substrate on the first core front- and back surfaces, wherein forming the laminated-core substrate includes forming a front section and a back section, wherein the front section includes couplings for a plurality of processors, wherein forming the back section includes forming an integral inductor coil within the back section, wherein the inductor coil includes the back PTH conductive pad, wherein at least one coupling communicates inductor-altered current from the integral inductor coil, and wherein forming the laminated-core substrate includes forming a tapered via in each of the front- and back sections that expose the PTH conductive pads and that include front- and back tapered contacts that contact the PTH conductive pad and that each include conductive pads coupled to the front- and back tapered vias.
A process of forming a semiconductor device substrate, comprising:
- forming a first core with a front surface and a back surface, and including an air core plated through hole (PTH) and front- and back PTH conductive pads in contact with the air core PTH;
- and
- forming a laminated-core substrate on the first core front- and back surfaces, wherein forming the laminated-core substrate includes forming a front section and a back section, and wherein forming the back section includes forming an integral inductor coil within the back section, wherein the inductor coil includes the back PTH conductive pad, wherein the back section includes at least three laminated layers, wherein two of the at least three laminated layers are shunted together;
- and wherein forming the laminated-core substrate includes forming a tapered via in each of the front- and back sections that expose the PTH conductive pads and that include front- and back tapered contacts that contact the PTH conductive pad and that each include conductive pads coupled to the front- and back tapered vias.
1 more element
A process of forming semiconductor device substrate, comprising:
- forming a first core with a front surface and a back surface, and including an air core plated through hole (PTH) and front- and back PTH conductive pads in contact with the air core PTH;
- and
- forming a laminated-core substrate on the first core front- and back surfaces, wherein forming the laminated-core substrate includes forming a front section and a back section, wherein forming the front section includes forming a first plurality of laminated-core layers, wherein forming the back section includes forming a second plurality of laminated-core layers, and wherein the first plurality is less than the second plurality, wherein forming the back section includes forming an integral inductor coil within the back section, wherein the inductor coil includes the back PTH conductive pad, and wherein forming the laminated-core substrate includes forming a tapered via in each of the front- and back sections that expose the PTH conductive pads and that include front- and back tapered contacts that contact the PTH conductive pad and that each include conductive pads coupled to the front- and back tapered vias.
A process of forming a semiconductor device substrate, comprising:
- forming a first core with a front surface and a back surface, and including an air core plated through hole (PTH) and front- and back PTH conductive pads in contact with the air core PTH;
- and
- forming a laminated-core substrate on the first core front- and back surfaces, wherein forming the laminated-core substrate includes forming a front section and a back section, and wherein forming the back section includes forming an integral inductor coil within the back section, wherein the inductor coil includes the back PTH conductive pad, wherein forming the laminated-core substrate includes forming a tapered via in each of the front- and back sections that expose the PTH conductive pads and that include front- and back tapered contacts that contact the PTH conductive pad and that each include tapered-via conductive pads coupled to the front- and back tapered vias;
- wherein forming the first core includes forming a complementary PTH and complementary back first through hole conductive pads;
- and
- wherein forming the integral inductor coil comprises forming a back first through hole conductive pad that has a crescent shape that is in contact with the air core PTH, and forming a complementary back first through hole conductive pad that has a crescent shape that is in contact with the complementary PTH.
3 more elements
Dependencies are inferred from the claim text.