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US 9,820,372 B2Granted
Segmented antenna assembly
AssigneeApplied Materials, Inc.
InventorBenjamin M. Johnston
Life of this patent
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Abstract
A segmented antenna assembly for use in a plasma enhanced chemical vapor deposition (PECVD) apparatus. One embodiment provides an apparatus comprising a chamber body having a top surface and a bottom surface, an antenna comprising a first segment, a second segment electrically coupled to the first segment and extending through an interior volume of the chamber, and a third segment electrically coupled to the second segment, and a dielectric layer disposed around an outer diameter of the second segment.
Claims11
An apparatus, comprising:
- a chamber body having a top and a bottom opposite the top;
- a linear antenna comprising:
- a first segment extending through the top;
- a second segment coupled to the first segment at a location within the top of the chamber body and extending through an interior volume of the chamber body;
- and
- a third segment extending through the bottom, wherein the third segment is coupled to the second segment at a location within the bottom of the chamber body, wherein each of the first segment and the third segment is able to disconnect from the second segment;
- at least two gas introduction tubes extending vertically from the bottom to the top, wherein the at least two gas introduction tubes are parallel to the antenna;
- and
- a dielectric layer disposed around an outer diameter of the second segment.
6 more elements
An apparatus, comprising:
- a chamber body having a top and a bottom opposite the top;
- a linear antenna comprising:
- a first segment;
- a second segment coupled to the first segment at a location within the top of the chamber body and extending through an interior volume of the chamber body;
- and
- a third segment coupled to the second segment at a location within the bottom of the chamber body, wherein each of the first segment and the third segment is able to disconnect from the second segment;
- at least two gas introduction tubes extending vertically from the bottom to the top, wherein the at least two gas introduction tubes are parallel to the antenna;
- and
- a dielectric layer disposed around an outer diameter of the second segment, wherein the first segment extends through the top surface of the chamber body, and the third segment extends through the bottom surface of the chamber body, and the antenna comprises a hollow electrically conductive tube adapted to transport a cooling fluid.
6 more elements
Dependencies are inferred from the claim text.