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US 9,816,172 B2Granted
Vacuum powered deposition apparatus
AssigneeSamsung Display Co., Ltd.
InventorsYoung-Uk Lee, Jeong-Won Han
Life of this patent
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Abstract
A vacuum powered deposition apparatus including a driving unit, a linear motion unit coupled to the driving unit and configured to move linearly according to operation of the driving unit, and an angle restriction unit coupled to the linear motion unit and configured to move in a direction perpendicular to that of the linear motion unit according to movement of the linear motion unit.
Claims14
An apparatus for restricting a deposition angle of deposition materials, the apparatus comprising:
- a driving unit;
- a linear motion unit coupled to the driving unit, the linear motion unit configured to move linearly in a first direction according to operation of the driving unit, and comprising a plurality of projection units projecting from the linear motion unit;
- an angle restriction unit coupled to the linear motion unit and configured to adjust the deposition angle of deposition materials sprayed from a deposition source unit by moving in a vertical direction, which comprises a component of direction that is perpendicular to the first direction of the linear motion unit, according to movement of the linear motion unit;
- an auxiliary guide unit comprising a guide at least partially surrounding the projection units, and configured to guide movement of the linear motion unit in the first direction;
- a fixing unit configured to enable the angle restriction unit to slide;
- and
- a side shield configured to be disposed inside the fixing unit,
- wherein the linear motion unit comprises a guide unit configured to guide a part of the angle restriction unit when the angle restriction unit moves, the guide unit comprising:
- a first guide;
- a second guide comprising a first end coupled to the first guide and extending diagonally from the first guide;
- and
- a third guide coupled to a second end of the second guide and vertically offset from the first guide.
9 more elements
Dependencies are inferred from the claim text.