Configurable variable position closed track magnetron

A magnetron assembly, comprising:

• a first base plate;
• a second base plate movable with respect to the first base plate between a first position and a second position;
• an outer magnetic pole in the shape of a loop and comprising an outer magnetic pole section coupled to the first base plate and an outer magnetic pole section coupled to the second base plate;
• and
• an inner magnetic pole disposed within the outer magnetic pole, wherein the outer and inner magnetic poles define a closed loop magnetic field, and wherein the closed loop magnetic field is maintained when the second base plate is disposed in both the first position and a second position, wherein each of the inner and outer magnetic poles are formed by a plurality of magnets, and wherein about 15% to about 25% of individual magnets of any plurality of magnets that form a given magnetic pole have a polarity opposite the polarity of remaining magnets of the plurality of magnets that form the given magnetic pole.

A magnetron assembly, comprising:

• a support member having a central axis about which the magnetron assembly rotates;
• a first base plate fixedly coupled to the support member;
• a second base plate movably coupled to the support member with a limited range of motion between a first position and a second position;
• an outer magnetic pole in the shape of a loop and comprising an outer magnetic pole section coupled to the first base plate and an outer magnetic pole section coupled to the second base plate;
• and
• an inner magnetic pole disposed within the outer magnetic pole, wherein the outer and inner magnetic poles define a closed loop magnetic field, and wherein the closed loop magnetic field is maintained when the second base plate is disposed in both the first position and a second position, wherein the closed loop magnetic field has a first geometric configuration when the second base plate is disposed in the first position and a second geometric configuration, different than the first geometric configuration, when the second base plate is disposed in the second position.