Micromechanical device for electromagnetic radiation sensing
AssigneeMP High Tech Solutions Pty Ltd
InventorMarek Steffanson
Life of this patent
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Abstract
Systems, methods, and apparatus for providing an improved electromagnetic radiation sensing micromechanical device to be utilized in high pixel-density pixel sensor arrays. The device includes an improved design for improved and adjustable performance through simple geometric or fabrication means. Furthermore, the design of the device lends itself to simple micromechanical manufacturing procedures. Additionally, the manufacturing procedures include a method to enable high uniformity and high yield sensor arrays. Arrays of the device can be utilized as IR imaging detectors for use in applications such as human presence detection, nonvisual environment monitoring, security and safety, surveillance, energy monitoring, fire detection and people counting.
Claims24
A micromechanical radiation sensor, comprising:
- an absorber/reflector plate including:
- an in-depth profile configured to enhance rigidity of the absorber/reflector plate;
- a structural layer including a radiation absorbing material;
- and
- a light reflecting layer including a light reflecting material, deposited over the structural layer;
- two substantially parallel and substantially identical supporting legs attached to the absorber/reflector plate, wherein the absorber/reflector plate is connected to the supporting legs at about the middle of each side of the plate that is substantially parallel to the supporting legs, with a connection line between the two connecting points running through about the plate's center of gravity, and each of the supporting legs including:
- two substantially parallel arms of substantially identical length, connected with each other at one end, and each of the arms including a bimaterial region, including the structural layer and the light reflecting layer, deposited over the structural layer, wherein the bimaterial region is of same length or of shorter length than the overall arm's length, and
- a thermal isolation region comprising the structural layer and devoid of the light reflecting layer, the thermal isolation region including two thermal isolation legs each extending into a space located between the two arms, each thermal isolation leg substantially parallel to one another, each thermal isolation leg pointing toward the absorber/reflector plate, and each thermal isolation leg shorter in length than either of the two arms;
- and
- two substantially identical anchors, each of the anchors attached substantially perpendicular to each of the supporting legs, the two anchors connecting the absorber/reflector plate through the two supporting legs to a substrate.
A micromechanical radiation sensor, comprising:
- an absorber/reflector plate including:
- a structural layer including a radiation absorbing material, and
- a light reflecting layer including a light reflecting material, deposited over a top surface of the structural layer, wherein the top surface of the structural layer comprises a first portion that is covered by the light reflecting layer and a second portion that is free of the light reflecting layer, and wherein the second portion reflects less light than the light reflecting layer;
- two substantially parallel and substantially identical supporting legs attached to the absorber/reflector plate, each of the supporting legs including:
- two substantially parallel arms of substantially identical length, connected with each other at one end, and each of the arms including a bimaterial region, including the structural layer and the light reflecting layer, deposited over the structural layer, wherein the bimaterial region is of same length or of shorter length than the overall arm's length, and
- a thermal isolation region comprising the structural layer and devoid of the light reflecting layer, the thermal isolation region including two thermal isolation legs each extending into a space located between the two arms, each thermal isolation leg substantially parallel to one another, each thermal isolation leg pointing toward the absorber/reflector plate, and each thermal isolation leg shorter in length than either of the two arms;
- and
- two substantially identical anchors, each of the anchors attached substantially perpendicular to each of the supporting legs, the two anchors connecting the absorber/reflector plate through the two supporting legs to a substrate.
Dependencies are inferred from the claim text.