Salt, resin, resist composition and method for producing resist pattern

A salt represented by formula (I):

• wherein Q 1 and Q2 independently represent a fluorine atom or a C1 to C6 perfluoroalkyl group,
• R1 and R2 each independently represent a hydrogen atom, a fluorine atom or a CI to C6 perfluoroalkyl group,
• z represents an integer of 0 to 6,
• R3 represents a hydrogen atom, a fluorine atom, a C1 to C12 alkyl group or a C1 to C12 fluorinated alkyl group,
• R4 represents —(CH2)n-Rf or —CHRf1Rf2, where n =1 to 6, and Rf, Rf1 and Rf2 are each independently a C1 to C6 perfluoroalkyl group,
• L2 represents a single bond, a C1 to C12 divalent saturated hydrocarbon group or *-A2-X1-(A3-X2)a-A4-,
• * represents a binding site to —CR3R4,
• A2, A3 and A4 each independently represent a C1 to C6 alkanediyl group,
• X1 and X2 each independently represent —O—, —CO—O— or —O—CO—,
• a represents 0 or 1,
• R5 represents a hydrogen atom, a halogen atom or a C1 to C6 alkyl group in which a hydrogen atom may be replaced by a halogen atom,
• L1 represents any one of groups represented by formulae (b1-1) to (b1-3), * represents a bonding site to —CR3R4;
• wherein Lb2 represents a single bond or a C1 to C22 divalent saturated hydrocarbon group where a hydrogen atom may be replaced by a fluorine atom;
• Lb3 represents a single bond or a C1 to C22 divalent saturated hydrocarbon group where a hydrogen atom may be replaced by a fluorine atom or a hydroxy group and where a methylene group may be replaced by an oxygen atom or a carbonyl group;
• provided that the carbon atoms contained in Lb2 and Lb3 is 22 or less in total;
• Lb4 represents a single bond or a C1 to C22 divalent saturated hydrocarbon group where a hydrogen atom may be replaced by a fluorine atom;
• Lb5 represents a single bond or a C1 to C22 divalent saturated hydrocarbon group where a hydrogen atom may be replaced by a fluorine atom or a hydroxy group, and a methylene group may be replaced by an oxygen atom or a carbonyl group;
• provided that the carbon atoms contained in Lb4 and Lb5 is 22 or less in total;
• Lb6 represents a single bond or a C1 to C23 divalent saturated hydrocarbon group where a hydrogen atom may be replaced by a fluorine atom or a hydroxy group;
• and
• Lb7 represents a single bond or a C1 to C23 divalent saturated hydrocarbon group where a hydrogen atom may be replaced by a fluorine atom or a hydroxy group, and a methylene group may be replaced by an oxygen atom or a carbonyl group;
• provided that the carbon atoms contained in Lb6 and Lb7 is 23 or less in total, and
• Z+ represents an organic cation.