Cyclodisilazane derivative, method for preparing the same and silicon-containing thin film using the same

A method for preparing a cyclodisilazane derivative represented by the following Chemical Formula 1, comprising:

• preparing a diaminosilane derivative represented by the following Chemical Formula 4 by reacting a silane derivative represented by the following Chemical Formula 2 with an amine derivative represented by the following Chemical Formula 3;
• and
• preparing the cyclodisilazane derivative represented by the following Chemical Formula 1 by an intramolecular cyclization reaction of the diaminosilane derivative represented by the following Chemical Formula 4 with a silane derivative represented by the following Chemical Formula 5 in the presence of (C1-C7)alkyllithium:
• in Chemical Formulas 1 to 5,
• R1 to R3 are each independently hydrogen, halogen, (C1-C5)alkyl or (C2-C5)alkenyl, and
• R4 is C3 alkyl or (C2-C5)alkenyl, and X is halogen.

A method for preparing a cyclodisilazane derivative represented by the following Chemical Formula 1-2, the method comprising:

• preparing the cyclodisilazane derivative represented by the following Chemical Formula 1-2 by reacting a halocyclodisilazane derivative represented by the following Chemical Formula 1-1 with a metal hydride or an alkali metal derivative represented by the following Chemical Formula 8:
• in Chemical Formulas 1-1, 1-2, and 8,
• M is an alkali metal;
• R10 is each independently hydrogen or (C1-C5)alkyl;
• at least one of R1 to R3 is halogen, and the remainder is hydrogen, halogen, (C1-C5)alkyl or (C2-C5)alkenyl;
• R4 is C3 alkyl or (C2-C5)alkenyl;
• and
• at least one of R1a to R3a is hydrogen, and the remainder is hydrogen, (C1-C5)alkyl or (C2-C5)alkenyl, wherein when R1 is halogen, R1a is hydrogen, and when R2 is halogen, R2a a is hydrogen, and when R3 is halogen, R3a a is hydrogen.

A method for preparing a cyclodisilazane derivative represented by the following Chemical Formula 9, the method comprising:

• preparing an aminosilane derivative represented by the following Chemical Formula 6 by reacting a silane derivative represented by the following Chemical Formula 2 with an amine derivative represented by the following Chemical Formula 3;
• preparing a halocyclodisilazane derivative represented by the following Chemical Formula 7 by an intramolecular cyclization reaction of the aminosilane derivative represented by the following Chemical Formula 6 in the presence of (C1-C7)alkyllithium;
• and
• preparing the cyclodisilazane derivative represented by the following Chemical Formula 9 by reacting the halocyclodisilazane derivative represented by the following Chemical Formula 7 with a metal hydride or an alkali metal derivative represented by the following Chemical Formula 8:
• in Chemical Formulas 2, 3 and 6 to 9,
• R1 is halogen;
• R2 is hydrogen, halogen, (C1-C5)alkyl or (C2-C5)alkenyl;
• R4 is C3 alkyl or (C2-C5)alkenyl;
• X is halogen;
• M is an alkali metal;
• R10 is hydrogen or (C1-C5)alkyl;
• R1a is hydrogen;
• wherein when R2 is hydrogen or halogen, R2a a is hydrogen, and
• when R2 is (C1-C5)alkyl or (C2-C5)alkenyl, R2a is (C1-C5)alkyl or (C2-C5)alkenyl.