Device and method for baking substrate
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorShih Ying Sun
Life of this patent
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Abstract
The present disclosure relates to a device and a method for baking a substrate. The device includes a hot plate, and a supporting member for supporting a substrate to be processed, wherein the supporting member is located between the hot plate and the substrate to be processed, and can move relative to the hot plate so as to adjust the contacting position of the supporting member with the substrate to be processed. With the device, the yield of the substrate can be increased.
Claims7
A device for baking a substrate, including:
- a hot plate, and
- a supporting member for supporting a substrate to be processed,
- wherein the supporting member is located between the hot plate and the substrate to be processed, and movable relative to the hot plate so as to adjust the contacting position of the supporting member with the substrate to be processed, and
- wherein the supporting member includes a plurality of elongated strip bases, and on the side of each elongated strip base facing away from the hot plate there is provided with a plurality of lift pins, which are arranged at intervals and configured to support the substrate to be processed.
A method for baking a substrate comprising a device for baking the substrate, which includes a hot plate, and a supporting member for supporting a substrate to be processed, wherein the supporting member is located between the hot plate and the substrate to be processed, and can be moved relative to the hot plate so as to adjust the contacting position of the supporting member with the substrate to be processed, and wherein the supporting member includes a plurality of elongated strip bases, and on the side of each elongated strip base facing away from the hot plate there is provided with a plurality of lift pins, which are arranged at intervals and configured to support the substrate to be processed,
- the method including the following steps:
- placing the supporting member in a baking oven for baking the substrate to be processed, and supporting the supporting member at two ends thereof;
- fixing the substrate to be processed in the baking oven;
- moving the supporting member so that the supporting member is located within non-display areas of the substrate to be processed;
- and
- heating the substrate to be processed with the hot plate.
Dependencies are inferred from the claim text.