Systems and apparatus having MEMS acoustic sensors and other MEMS sensors and methods of fabrication of the same

A micro electro-mechanical system (MEMS) device, comprising:

• a package having a port through the package and exposed to an environment;
• a MEMS microphone disposed at a first location on a surface within the package, wherein the MEMS microphone includes a diaphragm positioned such that acoustic waves received at the port of the package are incident on the diaphragm;
• and
• a MEMS detection structure enclosed within the package, wherein the MEMS detection structure comprises:
• a processor provided at a second location on the surface within the package;
• an integrated circuit coupled to the processor;
• and
• a MEMS measurement device coupled to the integrated circuit, wherein the MEMS measurement device comprises a three-axis accelerometer, a three-axis gyroscope and a pressure sensor, wherein the first location and the second location are distinct locations on the surface within the package, and wherein the MEMS microphone is located distinct from the processor on the surface within the package.

A micro electro-mechanical system (MEMS) device, comprising:

• a substrate having a first surface and a second surface, wherein the first surface is exposed to an environment outside the MEMS device;
• a MEMS microphone disposed at a first location on the second surface of the substrate and having a diaphragm positioned such that acoustic waves received at the MEMS microphone are incident on the diaphragm;
• an integrated circuit disposed at a second location on the second surface of the substrate, wherein the integrated circuit is electrically coupled to the MEMS microphone;
• and
• a MEMS measurement device disposed at a third location, wherein the MEMS measurement device comprises a pressure sensor, wherein the first location and the second location are distinct locations on the second surface of the substrate, and wherein the MEMS microphone is located distinct from the integrated circuit on the second surface of the substrate.