Electromechanical system structures with ribs having gaps
AssigneeQUALCOMM Incorporated
InventorsMark B. Andersson, Joyce H. Wu, Jasper Lodewyk Steyn
Life of this patent
Estimating the term…
Abstract
This disclosure provides systems, methods and apparatus for an electromechanical systems (EMS) assembly. The EMS assembly includes a substrate, an anchor disposed on the substrate, and a suspended planar body supported over the substrate by the anchor. The suspended planar body includes at least one depression extending out of a plane of the suspended planar body and protruding towards the substrate. The suspended planar body also includes a substantially horizontal portion corresponding to a gap in the at least one depression. An extent of the gap is up to 20% of a length of the suspended planar body.
Claims15
An electromechanical system (EMS) assembly, comprising:
- a substrate;
- an anchor disposed on the substrate;
- and
- a suspended planar body supported over the substrate by the anchor, wherein the suspended planar body defines a first aperture and a second aperture and includes:
- at least one depression extending out of a plane of the suspended planar body, and
- a substantially horizontal portion corresponding to a gap in the at least one depression, wherein the substantially horizontal portion extends in a same plane as the plane of the suspended planar body from a first edge of the suspended planar body to an opposing second edge of the suspended planar body, the first edge forms at least a portion of a perimeter of the first aperture, and the second edge forms at least a portion of a perimeter of the second aperture.
An electromechanical system (EMS) assembly, comprising:
- a substrate;
- an anchor disposed on the substrate;
- and
- a suspended planar body supported over the substrate by the anchor, wherein the suspended planar body includes:
- at least one depression extending out of a plane of the suspended planar body, and
- a substantially horizontal portion corresponding to a gap in the at least one depression, wherein the substantially horizontal portion extends in a same plane as the plane of the suspended planar body from a first edge of the suspended planar body to an opposing second edge of the suspended planar body, at least one of the first edge and the second edge is substantially perpendicular to a length of the suspended planar body, and an extent of the gap is up to 20% of the length of the suspended planar body,
- wherein at least one of the first edge and the second edge is substantially parallel to a direction of motion of the suspended planar body.
Dependencies are inferred from the claim text.