Piezoelectric device, liquid ejection head, and method of manufacturing piezoelectric device
AssigneeSeiko Epson Corporation
InventorMotoki Takabe
Life of this patent
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Abstract
A piezoelectric device includes a first substrate having an empty chamber, a diaphragm defining a surface of the empty chamber, a piezoelectric element formed by stacking a first electrode layer, a piezoelectric layer, and a second electrode layer in sequence from the diaphragm side, the piezoelectric element provided on the side of the diaphragm opposite to the empty chamber, and a second substrate provided on the side of the first substrate opposite to the diaphragm. The thickness of at least a part of the first substrate in an opening peripheral area of the empty chamber is thicker than the thickness in an area outside the opening peripheral area.
Claims6
A piezoelectric device comprising:
- a first substrate having an empty chamber;
- a diaphragm defining a surface of the empty chamber;
- a piezoelectric element formed by stacking a first electrode layer, a piezoelectric layer, and a second electrode layer in sequence from the diaphragm side, the piezoelectric element provided on the side of the diaphragm opposite to the empty chamber;
- and
- a second substrate provided on the side of the first substrate opposite to the diaphragm,
- wherein the thickness of at least a part of the first substrate in an opening peripheral area of the empty chamber is thicker than the thickness in an area outside the opening peripheral area,
- the thickness in the opening peripheral area causing a portion of the diaphragm in the opening peripheral area to be raised upward in a state where no voltage is applied to the piezoelectric element.
A piezoelectric device comprising:
- a first substrate having an empty chamber;
- a diaphragm defining a surface of the empty chamber;
- a piezoelectric element formed by stacking a first electrode layer, a piezoelectric layer, and a second electrode layer in sequence from the diaphragm side, the piezoelectric element provided on the side of the diaphragm opposite to the empty chamber;
- and
- a second substrate provided on the side of the first substrate opposite to the diaphragm,
- wherein the thickness of at least a part of the first substrate is gradually increased toward the empty chamber causing a portion of the diaphragm to be raised upward in a state where no voltage is applied to the piezoelectric element.
Dependencies are inferred from the claim text.