Film suction mechanism

An apparatus comprising:

• a film suction mechanism for holding a flexible film having a first surface and a second surface, comprising:
• a suction unit comprising a plurality of first suction pads;
• a first air nozzle configured to blow air toward a first side of the flexible film;
• a second air nozzle configured to blow air toward a second side opposite to the first side of the flexible film;
• and
• a plurality of robot hands each comprising a second suction pad and a swing drive mechanism,
• wherein the suction unit is configured to attach the second surface to the plurality of first suction pads by suction while the air is blown onto the first surface,
• wherein in the suction unit, the flexible film is held with a part of the plurality of first suction pads located in or near the middle of the suction unit, and then the flexible film is held with all of the plurality of first suction pads by blowing air onto the first surface,
• wherein the second suction pads of the plurality of robot hands are located between outermost two of the plurality of first suction pads, and
• wherein the swing drive mechanism included in each of the plurality of robot hands is configured to swing the corresponding robot hand on an axis parallel to the flexible film, so that one of the plurality of first suction pads located outside the second suction pad is capable of attaching the flexible film.

An apparatus comprising:

• a film suction mechanism for holding a flexible film, comprising:
• a plurality of first suction pads;
• an air nozzle under the plurality of first suction pads;
• and
• a plurality of robot hands each comprising a second suction pad and a swing drive mechanism,
• wherein the air nozzle is configured to blow air to the flexible film when the plurality of first suction pads hold the flexible film thereunder,
• wherein the flexible film is held with a part of the plurality of first suction pads, and then the flexible film is held with all of the plurality of first suction pads by blowing air to the flexible film,
• wherein the second suction pads of the plurality of robot hands are located between outermost two of the plurality of first suction pads, and
• wherein the swing drive mechanism included in each of the plurality of robot hands is configured to swing the corresponding robot hand on an axis parallel to the flexible film, so that one of the plurality of first suction pads located outside the second suction pad is capable of attaching the flexible film.

An apparatus comprising:

• a film suction mechanism for holding a flexible film, comprising:
• a plurality of first suction pads;
• an air nozzle;
• and
• a robot hand comprising a second suction pad and a swing drive mechanism, wherein:
• the air nozzle is configured to blow air to the flexible film when the plurality of first suction pads hold the flexible film thereunder,
• the flexible film is held with a part of the plurality of first suction pads, and then the flexible film is held with all of the plurality of first suction pads by blowing air onto the flexible film,
• the swing drive mechanism is configured to swing the robot hand on a first axis parallel to the flexible film, and
• the second suction pad is between two of the plurality of first suction pads which are arranged on a second axis perpendicular to the first axis.