Laser system and method thereof
AssigneeGentex Corporation
InventorsNiels A. Olesen, David A. Bender, Donald L. Bareman
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Abstract
A laser system includes a laser configured to emit pulse bursts and a motion device in optical communication with the laser. The motion device moves a laser beam along a process path on a substrate and is configured to have a natural frequency that is greater than an operating frequency of the laser system. The laser system enables high and constant speed processing along tight radii in the process path, which is useful to form laser induced channels along the process path with equal spacing.
Claims20
A laser system comprising:
- a laser configured to emit laser pulse bursts;
- and
- a motion device in optical communication with said laser and configured to deliver said laser pulse bursts to a plurality of spaced apart locations along a substrate to form a laser induced channel in the substrate at one or more of said plurality of spaced apart locations;
- wherein said motion device has a natural frequency greater than an operating frequency of the laser system to prevent resonant vibration when the motion device operates to change delivery location of the laser pulse bursts among said plurality of spaced apart locations at a constant speed.
A method of separating a substrate into first and second pieces, comprising the steps of:
- using a motion device to move a laser beam along the substrate at a constant speed, S, among a plurality of spaced apart locations along a curved process path having a minimum radius, r;
- and
- forming a laser induced channel in the substrate at each of said plurality of spaced apart locations,
- wherein the motion device is configured with a natural frequency that is greater than a system operating frequency, S/2πr.
Dependencies are inferred from the claim text.