Electronic assembly with fiducial marks for precision registration during subsequent processing steps
Assignee3M Innovative Properties Company
InventorsDaniel J. Theis, Ann M. Gilman, Kim B. Saulsbury, Matthew S. Stay, Shawn C. Dodds, Mikhail L. Pekurovsky
Life of this patent
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Abstract
An electronic assembly includes a substrate having in a first zone a low contrast first conductive pattern; a high contrast fiducial mark in a second zone of the substrate different from the first zone, wherein the fiducial mark and the first conductive pattern are in registration; and a second conductive pattern aligned with the first conductive pattern.
Claims20
A method, comprising:
- forming a resist layer overlying a patterned conductive nanowire layer in a first zone on a substrate to form a low contrast first conductive pattern;
- forming, substantially simultaneously with the first conductive pattern, a high contrast fiducial mark in a second zone of the substrate different from the first zone, wherein the fiducial mark is in registration with the first conductive pattern;
- forming, using the fiducial mark as a guide, a second pattern aligned with the first conductive pattern.
An electronic assembly, comprising:
- a substrate comprising in a first zone a low contrast first conductive pattern;
- a high contrast fiducial mark in a second zone of the substrate different from the first zone;
- wherein the fiducial mark and the first conductive pattern are in registration;
- and
- a second conductive pattern aligned with the first conductive pattern.
The electronic assembly of clam 9, wherein the circuit interconnect is in-plane with respect to the first conductive pattern.
An electronic assembly, comprising:
- a substrate comprising in a first zone a first conductive pattern, wherein the first conductive pattern comprises conductive nanowires overlain by a layer of a resist matrix material, and wherein the conductive pattern has an optical transmission in the visible region of greater than about 80%;
- a fiducial mark in a second zone of the substrate different from the first zone, wherein the fiducial mark has an optical transmission in the visible region of less than about 50%, and wherein the fiducial mark and the second conductive pattern are in registration with a dimensional accuracy of less than about 100 microns;
- and
- a second conductive pattern aligned with the first conductive pattern.
Dependencies are inferred from the claim text.