Microphone and method of manufacturing a structure for delaying the phase of sound input

A method of manufacturing a microphone, comprising:

• preparing a substrate and forming a vibrating membrane having an oxide film and a plurality of slots onto the substrate;
• forming a sacrificial layer and a fixed membrane over the vibrating membrane and forming air intake apertures through the fixed membrane;
• depositing a first pad to be connected with the fixed membrane and a second pad to be connected with the vibrating membrane;
• forming a penetration aperture by etching a rear side of the substrate;
• and
• bonding a phase delay unit on the fixed membrane, wherein the bonding of the phase delay unit includes:
• forming a sound passage by etching a plurality of phase delay layers with a photoresist (PR) patterning as a mask on the phase delay layers such that the sound passage is formed by sequentially stacking the phase delay layers;
• and
• forming passages for the first pad and the second pad, and sound apertures by etching the phase delay layers with the PR patterning as a mask on a rear side of the phase delay layers, after turning the phase delay layers up or down.