Cover window, manufacturing method thereof and flexible display apparatus comprising the same
AssigneeSamsung Display Co., Ltd.
InventorsMyungsoo Huh, Sungchul Kim, Choelmin Jang, Cheollae Roh, Jaihyuk Choi
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Abstract
Provided is a cover window includes a first layer including a polymer material, a second layer above a first surface of the first layer and including an oxide of a first metal, and an intermediate region between the first layer and the second layer, wherein the intermediate region includes the oxide of the first metal where the first metal binds to a dangling bond of oxygen of the polymer material, and the oxide of the first metal included in the second layer has a different composition ratio than the oxide of the first metal included in the intermediate region.
Claims20
A cover window comprising:
- a first layer comprising a polymer material;
- a second layer above a first surface of the first layer and comprising an oxide of a first metal;
- and
- an intermediate region between the first layer and the second layer,
- wherein the intermediate region comprises the oxide of the first metal and the first metal bound to a dangling bond of oxygen of the polymer material, and
- the oxide of the first metal comprised in the second layer has a different composition ratio than the oxide of the first metal comprised in the intermediate region.
A method of manufacturing a cover window, the method comprising:
- forming a first layer by using a polymer material;
- forming a seed layer on a first surface of the first layer by using a first metal;
- forming a second layer by depositing an oxide of the first metal on the seed layer;
- and
- heating the seed layer by irradiating an electronic beam on the second layer,
- wherein the heated seed layer forms an intermediate region by a reaction between the first layer and the second layer, and the intermediate region comprises the oxide of the first metal and the first metal bound to a dangling bond of oxygen of the polymer material, and
- a composition ratio of the oxide of the first metal comprised in the intermediate region is different from a composition ratio of the oxide of the first metal comprised in the second layer.
Dependencies are inferred from the claim text.