Heterogeneous nanostructures for hierarchal assembly

A method of making a carbon nanotube structure, the method comprising:

• depositing a first oxide layer on a substrate, and depositing a second oxide layer on the first oxide layer;
• etching a trench through the second oxide layer to expose the first oxide layer;
• removing end portions of the first oxide layer and corresponding portions of the substrate beneath the end portions of the first oxide layer to form cavities in the substrate;
• depositing a metal in the cavities in the substrate to form first body metal pads that are embedded in the substrate;
• disposing a carbon nanotube on the first body metal pads and the first oxide layer such that ends of the carbon nanotube contact each of the first body metal pads;
• depositing a metal to form second body metal pads on the first body metal pads at the ends of the carbon nanotube;
• and
• etching to release the carbon nanotube, first body metal pads, and second body metal pads from the substrate, first oxide layer, and second oxide layer.