Piezoelectric actuator
OwnerMichael Förg, Hubert Lachnerinventors
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Abstract
A piezoelectric actuator is provided which acts as a micromechanical actuating element. Thus, the piezoelectric actuator has a piezoelectric element and an electrode structure, wherein said electrode structure is arranged with the electrodes thereof exclusively on one side of the piezoelectric element. Furthermore, the piezoelectric actuator has at least one attachment element, wherein the attachment element is fitted on the piezoelectric element and on the side of the electrode structure of the piezoelectric element, and the attachment element at least partially encompasses the electrode structure of the piezoelectric actuator. The attachment element in the process, by virtue of encompassing the electrode structure, provides a physical limit for the expansion of the piezoelectric element.
Claims11
A piezoelectric actuator, comprising:
- a piezoelectric element;
- an electrode structure having electrodes and arranged exclusively on a side of the piezoelectric element;
- and
- at least one attachment element attached to the piezoelectric element on a same side as the side on which the electrode structure is arranged, wherein the at least one attachment element at least partially encompasses the electrode structure of the piezoelectric actuator, and wherein the at least one attachment element is exclusively in contact with the piezoelectric element.
A piezoelectric actuator, comprising:
- a piezoelectric element;
- an electrode structure having electrodes and arranged exclusively on a side of the piezoelectric element;
- and
- at least one attachment element attached to the piezoelectric element on a same side as the side on which the electrode structure is arranged, wherein the at least one attachment element at least partially encompasses the electrode structure of the piezoelectric actuator, wherein an area of the piezoelectric element at least partially encompassed by the at least one attachment element is completely or nearly completely covered by the electrode structure, and wherein the attachment element is formed of a material with high conductivity and is grounded.
Dependencies are inferred from the claim text.