Display substrates, methods of manufacturing the same and display devices including the same
AssigneeSamsung Display Co., Ltd.
InventorsSung-Ho Kim, Jong-Moo Huh
Life of this patent
Estimating the term…
Abstract
A display substrate includes a base substrate, a switching device on the base substrate and an alignment pattern. The switching device includes an active pattern, a gate insulation layer pattern partially covering the active pattern, a gate electrode on the gate insulation layer pattern, and a source electrode and a drain electrode electrically connected to the active pattern. The alignment pattern has a multi-layered structure and is spaced apart from the switching device on the base substrate. The alignment pattern includes materials which have different transmittances.
Claims4
A method of manufacturing a display substrate, comprising:
- providing a base substrate comprising a first region and a second region;
- forming a dummy layer, a buffer layer, and an active layer sequentially on the base substrate;
- partially etching the active layer, the buffer layer, and the dummy layer such that a first dummy pattern, a first buffer layer pattern, and an active pattern sequentially stacked on the base substrate are formed on the first region, and a second dummy pattern, a second buffer layer pattern, and a dummy active pattern sequentially stacked on the base substrate are formed on the second region;
- forming a gate insulation layer covering the active pattern and the dummy active pattern on the base substrate;
- forming a gate electrode which is superimposed over the active pattern on the gate insulation layer;
- partially etching the gate insulation layer using the gate electrode as an etching mask;
- forming an insulating interlayer covering the gate electrode and the dummy active pattern on the base substrate;
- and
- forming a source electrode and a drain electrode electrically connected to the active pattern through the insulating interlayer.
Dependencies are inferred from the claim text.