Back to results
US 9,806,125 B2Granted
Compositionally graded photodetectors
AssigneeCarrier Corporation
InventorsRhonda R. Willigan, Jose L. Santana, Marcin Piech
Life of this patent
Estimating the term…
Abstract
An ultraviolet photodetector for a sensor device includes a film deposited on a substrate. The film includes a compositionally graded magnesium-zinc oxide having a ratio of magnesium-to-zinc that decreases between a portion of the film adjacent to the substrate and a portion of the film opposite the substrate for shifting the peak absorption of the film toward the visible wavelengths of the electromagnetic spectrum.
Claims22
An ultraviolet (UV) photodetector, comprising:
- a substrate;
- an electrode coupled to the substrate;
- and
- a compositionally graded magnesium-zinc oxide film deposited on the substrate and connected to the electrode, wherein the film comprises:
- a base layer with a MgxZn(1-x)O composition overlaying the substrate;
- one or more intermediate layers with a MgyZn(1-y)O composition overlaying the base layer;
- and
- an incident layer with a MgzZn(1-z)O composition overlaying the intermediate layer, wherein x is greater than y, and wherein y is greater than z, the film having a zinc content that increases from a portion of the film adjacent the substrate to a portion of the film opposite the substrate to red shift the peak absorption of the film.
5 more elements
An ultraviolet (UV) photodetector, comprising:
- a substrate;
- an electrode coupled to the substrate;
- and
- a compositionally graded magnesium-zinc oxide film deposited on the substrate and connected to the electrode,
- wherein the film comprises three or more layers overlaying the substrate and zinc content increases stepwise from a first layer adjacent the substrate through an incident layer, and
- wherein the film has a zinc content that increases from a portion of the film adjacent the substrate to a portion of the film opposite the substrate to red shift the peak absorption of the film.
3 more elements
Dependencies are inferred from the claim text.