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AssigneesBoe Technology Group Co., Ltd., Beijing Boe Optoelectronics Technology Co., Ltd.
InventorsTiansheng Li, Zhenyu Xie
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The present disclosure provides a half tone mask plate used to manufacture an active layer pattern as well as a source electrode pattern, a drain electrode pattern and a data line pattern located on the active layer pattern included in the array substrate. A surface of the array substrate includes a first region corresponding to the source electrode pattern, the drain electrode pattern and the data line pattern, a second region corresponding to a region of the active layer pattern located between the source electrode pattern and the drain electrode pattern, as well as a third region in addition to the first region and the second region; the half tone mask plate includes a semi-transparent region corresponding to the second region and a partial region of the third region.
A half tone mask plate comprising:
Dependencies are inferred from the claim text.