US 9,806,097 B2 · Metal oxide semiconductor thin film, thin film transistor, and their fabricating methods, and display apparatus

Abstract

A metal oxide semiconductor thin film, a thin film transistor (TFT), methods for fabricating the metal oxide semiconductor thin film and the TFT, and a display apparatus are provided. In some embodiments, the metal oxide semiconductor comprises: a first metal element, a second metal element and a third metal element, wherein: the first metal element is at least one of scandium, yttrium, aluminum, indium, and a rare earth element; the second metal element is at least one of calcium, strontium, and barium; and the third metal element is at least one of titanium and tin.

Claims20

Dependent claims

A metal oxide semiconductor, comprising a metal oxide including a first metal element, a second metal element and a third metal element, wherein:

the first metal element is at least one of scandium, yttrium, aluminum, indium, or a rare earth element;
the second metal element is at least one of calcium, strontium, or barium;
and
the third metal element is at least one of titanium or tin.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

15/038,127Filed 10 Dec 2015

Priority

CN 2015 1 03791221 Jul 2015

Published

US 2017/0170208 A115 Jun 2017

Granted

31 Oct 2017

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

H10D 86/60
Characterised by multiple TFTs: wherein the TFTs are in active matrices
H10D 30/6755
Characterised by the active materials: oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
H10D 62/405
Crystalline structures: orientations of crystalline planes
H10D 62/80
Semiconductor bodies, or regions thereof, of devices having potential barriers: characterised by the materials

Metal oxide semiconductor thin film, thin film transistor, and their fabricating methods, and display apparatus

Life of this patent

Metal oxide semiconductor thin film, thin film transistor, and their fabricating methods, and display apparatus

Life of this patent

Abstract

Claims20