Semiconductor device structure and manufacturing method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLi-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
Life of this patent
Estimating the term…
Loading patent…
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLi-Guo Lee, Yung-Sheng Liu, Yi-Chen Liu, Yi-Jen Lai, Chun-Jen Chen, Hsi-Kuei Cheng
Estimating the term…
A semiconductor device structure and a manufacturing method are provided. The semiconductor device structure includes a semiconductor substrate and a dielectric layer over the semiconductor substrate. The semiconductor device structure also includes a conductive trace over the dielectric layer. The semiconductor device structure further includes a conductive feature over the conductive trace, and a width of the conductive feature is substantially equal to or larger than a maximum width of the conductive trace. In addition, the semiconductor device structure includes a conductive bump over the conductive feature.
A semiconductor device structure, comprising:
A semiconductor device structure, comprising:
A method for forming a semiconductor device structure, comprising:
Dependencies are inferred from the claim text.