Calibration method for heat treatment units

A calibration method for determining temperature set point corrections to be applied to nominal temperature set points of each N heating zone of a heat treatment unit having L substrate locations, the heat treatment unit and the nominal temperature set points defining a method aimed at establishing a substrate target characteristic, the method being characterized in that it includes the following steps:

• establishing a sensitivity model linking variations of the substrate target characteristic at each M representative location of the L substrate locations to temperature set point variations applied in each of the N heating zones, the variations respectively reflecting differences with respect to the substrate target characteristic and with respect to the nominal temperature set points;
• executing the process in the heat treatment unit and on the basis of the nominal temperature set points;
• measuring the substrate target characteristic at least at a representative measurement location of each heating zone of the heat treatment unit to supply M measurements;
• and
• determining temperature set point corrections from the sensitivity model, the measurements and the substrate target characteristic.