Substrate conveyance method

A method for conveying a disk-shaped substrate to a substrate processing chamber by a conveyance unit, the method comprising:

• acquiring, in advance, a reference substrate position as a reference of a position of the substrate when the substrate is conveyed;
• acquiring a conveyance substrate position which is a position of the substrate conveyed to the substrate processing chamber;
• calculating a positional deviation of the conveyance substrate position with respect to the reference substrate position;
• correcting a pathway of the substrate to the substrate processing chamber to eliminate the calculated positional deviation;
• and
• conveying the substrate to the substrate processing chamber based on the corrected pathway of the substrate,
• wherein the acquiring the conveyance substrate position includes:
• disposing two position sensors in a conveyance route of the substrate such that the two position sensors are spaced apart from each other at an interval smaller than a diameter of the substrate, and face the conveyed substrate;
• acquiring four intersecting points where the two position sensors intersect with an outer edge of the substrate while the substrate is conveyed to the substrate processing chamber;
• creating a plurality of combinations of intersecting points, each combination being composed of three intersecting points, from the four intersecting points;
• defining circles each of which passes through the three intersecting points in each of the combinations;
• and
• acquiring the conveyance substrate position based on a circle having a diameter most close to the diameter of the conveyed substrate among the defined circles.

A method for conveying a disk-shaped substrate to a substrate processing chamber by a conveyance unit, the method comprising:

• acquiring, in advance, a reference substrate position as a reference of a position of the substrate when the substrate is conveyed;
• acquiring a conveyance substrate position which is a position of the substrate conveyed to the substrate processing chamber;
• calculating a positional deviation of the conveyance substrate position with respect to the reference substrate position;
• correcting a pathway of the substrate to the substrate processing chamber to eliminate the calculated positional deviation;
• and
• conveying the substrate to the substrate processing chamber based on the corrected pathway of the substrate,
• wherein the acquiring the conveyance substrate position includes:
• disposing a position sensor in a conveyance route of the substrate such that the position sensor faces the conveyed substrate;
• acquiring two intersecting points among four intersecting points where the position sensor intersects with an outer edge of the substrate while the substrate is conveyed to the substrate processing chamber;
• and
• geometrically acquiring the conveyance substrate position based on the two intersecting points and a radius of the conveyed substrate.