Nonvolatile semiconductor memory device

Abstract

According to one embodiment, a nonvolatile semiconductor memory device includes a first structure having a first insulating layer, a semiconductor layer, and a second insulating layer stacked in this order in a first direction, the first structure extending in a second direction, memory cells provided on a surface of the semiconductor layer facing in a third direction, and connected in series in the second direction, and a third insulating layer contacting at least one of first and second end portions of the first structure in the second direction and not covering at least a part of an area between the first and second end portions. A lattice spacing of semiconductor atoms in the semiconductor layer in the second direction is larger than a lattice spacing of the semiconductor atoms in the semiconductor layer in the first direction.

Dependencies are inferred from the claim text.