Automated SEM nanoprobe tool

A method, comprising:

• directing a primary beam of energetic particles from a primary beam column onto a location of interest on a sample containing one or more integrated circuit structures, wherein the primary beam is directed to a next location of interest after each transient emission of secondary charged particles that is triggered by irradiation of the location of interest by the primary beam;
• detecting secondary charged particles generated as a result of an interaction between the primary beam of energetic particles and the location of interest with a detector;
• measuring a behavior of generation of the secondary charged particles, wherein three or more measurements are obtained within about 10 ns or less over the course of a measurement interval;
• and
• characterizing the location by comparing the three or more measurements to a predetermined reference behavior of secondary charged particles versus time for a non-defective reference area.

A non-transitory computer-readable medium having computer executable instructions embodied therein, the computer executable instructions being configured to implement a method when executed, the method comprising:

• directing a primary beam of energetic particles from a primary beam column onto a location of interest on a sample containing one or more integrated circuit structures, wherein the primary beam is directed to a next location of interest after each transient emission of secondary charged particles that is triggered by irradiation of the location of interest by the primary beam;
• detecting secondary charged particles generated as a result of an interaction between the primary beam of energetic particles and the location of interest with a detector;
• measuring a behavior of generation of the secondary charged particles, wherein three or more measurements are obtained within about 10 ns or less over the course of a measurement interval;
• and
• characterizing the location by comparing the three or more measurements to a predetermined reference behavior of secondary charged particles versus time for a non-defective reference area.