Signal charged particle deflection device, signal charged particle detection system, charged particle beam device and method of detection of a signal charged particle beam

A method of detection of a signal charged particle beam in a charged particle beam device, the method comprising:

• separating a signal charged particle beam from a primary charged particle beam by means of a beam splitter;
• deflecting the signal charged particle beam by means of a beam bender, wherein the beam bender includes a first electrode and a second electrode providing an optical path for the signal charged particle beam therebetween, wherein the first electrode has a first cross section in a plane perpendicular to the optical path, and the second electrode has a second cross section in the plane perpendicular to the optical path, and wherein a first part of the first cross section and a second part of the second cross section provide the optical path therebetween, and wherein the first part and the second part are different in shape;
• and
• focusing the signal charged particle beam on at least one detection element by means of a focusing lens.

A method of detection of a signal charged particle beam in a charged particle beam device, the method comprising:

• separating a signal charged particle beam from a primary charged particle beam by means of a beam splitter;
• deflecting the signal charged particle beam by means of a beam bender;
• and
• focusing the signal charged particle beam on at least one detection element by means of a focusing lens,
• wherein the signal charged particle beam enters the beam bender at an entry portion of the beam bender and exits the beam bender at an exit portion of the beam bender, and
• wherein the signal charged particle beam at least one of enters or exits the beam bender through one or more apertures having a substantially triangularly shaped passage area for the signal charged particle beam.