Mirror support module, a kit and a scanning electron microscope
AssigneeApplied Materials Israel Ltd.
InventorsEfim Vinnitsky, Samuel Ives Nackash, Shmuel Barak Mizrahi, Natan Schlimoff
Life of this patent
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Abstract
A mirror support module having a body that includes an internal portion surrounding an inner space, an external portion, an aperture formed in the body and an intermediate region that extends between a segment of the internal portion and the aperture. When the intermediate region is subjected to a force directed in a first direction, the intermediate region can be moved in the first direction towards the aperture to reduce an area of the aperture while the external portion remains stable regardless of movement of the intermediate region.
Claims18
A mirror support module for supporting a mirror, the mirror support module comprising:
- a body that comprises an internal portion that surrounds an inner space, an external portion, a first aperture formed in the body, and a first intermediate region that extends between a first segment of the internal portion and the first aperture;
- wherein the first intermediate region is configured to move at a first direction and towards the first aperture thereby reducing an area of the first aperture, when the first intermediate region is subjected to a force that is directed to the first direction;
- and
- wherein the external portion maintains stable regardless a movement of the first intermediate region.
A kit comprising:
- a mirror;
- a mirror support module having a body that comprises:
- an internal portion that surrounds an inner space, an external portion, a first aperture that is formed in the body, and a first intermediate region that extends between a first segment of the internal portion and the first aperture;
- and
- an interface for attaching the mirror to the mirror support module;
- wherein the first intermediate region is configured to move at a first direction and towards the first aperture thereby reducing an area of the first aperture, when the first intermediate region is subjected to a force that is directed to the first direction;
- and
- wherein the external portion maintains stable regardless a movement of the first intermediate region.
A scanning electron microscope, comprising:
- a scanning electron microscope column that is configured to generate a primary electron beam;
- a mirror support module including a body that comprises:
- an internal portion that surrounds an inner space in which the scanning electron microscope column is positioned, an external portion, a first aperture that is formed in the body, and a first intermediate region that extends between a first segment of the internal portion and the first aperture;
- and
- an interface for attaching a mirror to the mirror support module;
- wherein the first intermediate region is configured to move at a first direction and towards the first aperture thereby reducing an area of the first aperture, when the first intermediate region is subjected to a force that is directed to the first direction due to a heating of the scanning electron microscope column;
- and
- wherein the external portion maintains stable regardless a movement of the first intermediate region.
Dependencies are inferred from the claim text.