Blanking device for multi-beam of charged particle writing apparatus using multi-beam of charged particle and defective beam blocking method for multi-beam of charged particle

A blanking device for multi-beam of charged particles comprising:

• a plurality of separate blanking systems which are arrayed and each of which is configured to provide blanking control that switch a corresponding beam of multi-beam of charged particles between a beam ON state and a beam OFF state, the each of the plurality of separate blanking systems including
• a first electrode,
• a first potential applying control circuit configured to apply two different potentials selectively to the first electrode for the blanking control,
• a second electrode configured to perform blanking deflection of the corresponding beam, the second electrode being grounded and paired with the first electrode, and
• a potential change control circuit configured to change a potential of the second electrode from a ground potential to another potential,
• wherein the first electrode is connected to a ground via the first potential applying control circuit, the second electrode is grounded via a circuit element outside of the potential change control circuit, in a normal blanking control state the first potential applying control circuit is configured to alternately switch application of the ground potential and the another potential to the first electrode, and in an abnormal blanking control state in which a potential of the first electrode included in one of the plurality of separate blanking systems is fixed to the ground potential such that switching application of the two different potentials cannot be applied to the first electrode, the potential change control circuit is configured to change the potential of the second electrode corresponding to the first electrode fixed to the ground potential, from the ground potential to the another potential.