Method of manufacturing a magnetic film having high coercivity for use as a hot seed in a magnetic write head
AssigneeHeadway Technologies, Inc.
InventorsShengyuan Wang, Kunliang Zhang, Min Li
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Abstract
A method of forming a sub-structure, suitable for use as a hot seed in a perpendicular magnetic recording head, is described. A buffer layer of alumina with a thickness of 50-350 Angstroms is formed by atomic layer deposition as a write gap. Thereafter, one or more seed layers having a body-centered cubic (bcc) crystal structure may be deposited on the buffer layer. Finally, a magnetic film made of FeCo or FeNi with a coercivity of 60-110 Oe is deposited on the seed layer(s) by a physical vapor deposition (PVD) method at a rate of 0.48 to 3.6 Angstroms per second. The magnetic film is preferably annealed at 220° C. for 2 hours in a 250 Oe applied magnetic field.
Claims8
A process to form a magnetic film with a coercivity of sufficient magnitude for use as a hot seed in a magnetic recording writer having a write gap (WG), comprising:
- (a) providing a substrate in a perpendicular magnetic recording writer;
- (b) forming a buffer layer of Al2O3 between 50 and 350 Angstroms thick on the substrate with an atomic layer deposition process;
- (c) depositing the magnetic film on the buffer layer with a physical vapor deposition process at a deposition rate in a range of from 0.48 to 3.6 Angstroms per second wherein the magnetic film is selected from the group consisting of Fe1-xCox wherein x is about 20-55 atomic %, and Fe1-yNiy wherein y is about 5-55 atomic %;
- and
- (d) annealing the magnetic film at a temperature from about 180° C. to 300° C. in an externally applied magnetic field ranging from 200 to 1000 Oe for at least 1.5 hours.
Dependencies are inferred from the claim text.