Method and device for testing semiconductor manufacturing equipment automation program
AssigneeSemiconductor Manufacturing International (Shanghai) Corporation
InventorYu Na Wang
Life of this patent
Estimating the term…
Abstract
A method for testing an equipment automation program may be implemented using a hardware device and may include the following steps: receiving user input through a user interface of the device; automatically identifying a test scenario based on the user input; automatically and sequentially fetching a plurality of messages according to the test scenario; and automatically and sequentially sending the messages to the equipment automation program.
Claims20
A method for testing an equipment automation program, the method being performed using a device that includes hardware, the method comprising:
- receiving user input through a user interface of the device;
- automatically identifying a test scenario based on the user input;
- automatically and sequentially fetching a plurality of messages according to the test scenario;
- automatically fetching a first message according to the test scenario, the first message being one of the messages;
- automatically sending the first message to the equipment automation program;
- and
- after sending the first message, automatically recording at least one of the first message and information related to the first message in a log file,
- wherein a file format of the log file is identical to a file format of a stored message that is stored in a message library file, and
- wherein the first message contains a message body of the stored message.
A method for testing an equipment automation program, the method being performed using a device that includes hardware, the method comprising:
- receiving user input through a user interface of the device;
- automatically identifying a test scenario based on the user input;
- automatically and sequentially fetching a plurality of messages according to the test scenario;
- automatically fetching a first message according to the test scenario, the first message being one of the messages;
- automatically determining whether a trigger is needed before sending the first message to the equipment automation program;
- automatically sending the first message to the equipment automation program if no trigger is needed;
- receiving an equipment-automation-program-provided message from the equipment automation program, wherein a function code of the equipment-automation-program-provided message is odd;
- after the receiving, automatically determining whether the device is waiting for the trigger;
- and
- automatically sending a reply message to the equipment automation program if the device is not waiting for the trigger, wherein a function code of the reply message is even.
A device for testing an equipment automation program, the device comprising:
- a user interface configured to receive user input;
- a processor configured to automatically identify a test scenario based on the user input, configured to automatically and sequentially fetch a plurality of messages according to the test scenario, and configured to automatically send at least tens of the messages to the equipment automation program within a second;
- and
- a hardware element configured to perform tasks associated with at least one of the user interface and the processor.
Dependencies are inferred from the claim text.