Optimization program and substrate process system
AssigneeFuji Machine Mfg. Co., Ltd.
InventorKazuya Fukao
Life of this patent
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Abstract
An optimization device, that optimizes a process procedure for each of a plurality of process machines in a substrate process system in which circuit substrates can be transported on two paths, including a first process for setting a process procedure for each of the process machines so as to optimize a total process time that is the sum of a process time for each of the plurality of process machines for a circuit substrate being transported on one of the two paths, and a process time for each of the plurality of process machines for a circuit substrate being transported on the other of the two paths; and a second process for setting a process procedure for each of the process machines so as to optimize the process times.
Claims18
An optimization device that optimizes a process procedure for each of a plurality of process machines in a substrate process system which includes the plurality of process machines, each of the plurality of processing machines having a pair of substrate transportation devices for transporting circuit substrates on two paths and being arranged in a row, and the circuit substrates being transported on the two paths from an upstream process machine to a downstream process machine among the plurality of process machines, the device comprising:
- first process setting means for setting a process procedure for each of the plurality of process machines so as to optimize a total process time that is a sum of (i) a process time for each of the plurality of process machines for a circuit substrate being transported on one of the two paths and (ii) a process time for each of the plurality of process machines for a circuit substrate being transported on an other of the two paths;
- second process setting means for setting a process procedure for each of the plurality of process machines so as to:
- optimize a process time for each of the plurality of process machines for a circuit substrate being transported on the one of the two paths, and
- optimize a process time for each of the plurality of process machines for a circuit substrate being transported on the other of the two paths;
- and
- procedure selecting means for selecting one of a first process procedure and a second process procedure, the first process procedure being a process procedure that is set for each of the plurality of process machines by the first process setting means, and the second process procedure being a process procedure that is set for each of the plurality of process machines by the second process setting means,
- wherein the procedure selecting means selects the one of the first process procedure and the second process procedure based on whether circuit substrates that are planned for production in the substrate process system are processed on only one of the two paths or on both of the two paths.
A substrate process system comprising:
- a plurality of process machines, each of the plurality of processing machines having a pair of substrate transportation devices for transporting circuit substrates on two paths and being arranged in a row;
- and
- a control device that controls an operation of each of the plurality of process machines,
- wherein the circuit substrates are transported on the two paths from an upstream process machine to a downstream process machine among the plurality of process machines,
- wherein the control device includes:
- a first process procedure-based control unit that controls the operation of each of the plurality of process machines according to a process procedure which is set for each of the plurality of process machines so as to optimize a total process time that is a sum of (i) a process time for each of the plurality of process machines for a circuit substrate being transported on one of the two paths and (ii) a process time for each of the plurality of process machines for a circuit substrate being transported on an other of the two paths;
- a second process procedure-based control unit that controls the operation of each of the plurality of process machines according to a process procedure which is set for each of the plurality of process machines so as to:
- optimize a process time for each of the plurality of process machines for a circuit substrate being transported on the one of the two paths, and
- optimize a process time for each of the plurality of process machines for a circuit substrate being transported on the other of the two paths;
- a control selection unit that selects one of the first process procedure-based control unit and the second process procedure-based control unit to control the operation of each of the plurality of process machines based on whether circuit substrates that are planned for production in the substrate process system are processed on only one of the two paths or on both of the two paths.
An optimization device that optimizes a process procedure for each of a plurality of process machines in a substrate process system which includes the plurality of process machines, each of the plurality of processing machines having a pair of substrate transportation devices for transporting circuit substrates on two paths and being arranged in a row, and the circuit substrates being transported on the two paths from an upstream process machine to a downstream process machine among the plurality of process machines, the device comprising:
- circuitry configured to:
- set a first process procedure for each of the plurality of process machines so as to optimize a total process time that is a sum of (i) process time for each of the plurality of process machines for a circuit substrate being transported on one of the two paths and (ii) a process time for each of the plurality of process machines for a circuit substrate being transported on an other of the two paths;
- set a second process procedure for each of the plurality of process machines so as to:
- optimize a process time for each of the plurality of process machines for a circuit substrate being transported on the one of the two paths, and
- optimize a process time for each of the plurality of process machines for a circuit substrate being transported on the other of the two paths;
- and
- select one of the first process procedure and the second process procedure based on whether circuit substrates that are planned for production in the substrate process system are processed on only one of the two paths or on both of the two paths.
Dependencies are inferred from the claim text.