Method for operating a rotation rate sensor
AssigneeRobert Bosch GmbH
InventorAlexander Buhmann
Life of this patent
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Abstract
A method for operating a rotation rate sensor is provided, the rotation rate sensor including a seismic mass, in a first operating step a drive signal and a test signal being provided, in a second operating step a modulation signal being generated by modulating the drive signal with the test signal, in a third operating step the seismic mass being driven to carry out a drive movement as a function of the modulation signal, a detection signal being detected as a function of a step a demodulation signal being provided, a sensor signal being generated by demodulating the detection signal with the demodulation signal, in the fourth operating step a demodulation phase of the demodulation signal being adapted in such a way that a rotation rate offset of the detection signal is compensated for.
Claims15
A method for operating a rotation rate sensor, which includes a seismic mass, a drive device to drive the seismic mass along a first direction, and a detection device to detect movement of the seismic mass along a second direction perpendicular to the first direction in response to a rotation rate applied to the rotation rate sensor about an axis perpendicular to the first and second directions, the method comprising:
- providing a drive signal and a test signal;
- generating a modulation signal by modulating the drive signal with the test signal;
- driving the seismic mass using the drive device to carry out a drive movement along the first direction as a function of the modulation signal;
- detecting, using the detection device, a detection signal as a function of a detection movement of the seismic mass along the second direction perpendicular to the first direction;
- and
- providing a demodulation signal, a sensor signal being generated by demodulating the detection signal with the demodulation signal, wherein a demodulation phase of the demodulation signal is adapted so that a rotation rate offset of the detection signal is continuously compensated for.
A rotation rate sensor, comprising:
- a substrate;
- a seismic mass deflectable relative to the substrate;
- a drive device to drive the seismic mass along a first direction;
- and
- a detection device to detect movement of the seismic mass along a second direction perpendicular to the first direction in response to a rotation rate applied to the rotation rate sensor about an axis perpendicular to the first and second directions;
- wherein the rotation rate sensor is configured for operating as follows:
- providing a drive signal and a test signal;
- generating a modulation signal by modulating the drive signal with the test signal;
- driving the seismic mass using the drive device to carry out a drive movement along the first direction as a function of the modulation signal;
- detecting, using the detection device, a detection signal as a function of a detection movement of the seismic mass along the second direction perpendicular to the first direction;
- and
- providing a demodulation signal, a sensor signal being generated by demodulating the detection signal with the demodulation signal, wherein a demodulation phase of the demodulation signal is adapted so that a rotation rate offset of the detection signal is continuously compensated for.
Dependencies are inferred from the claim text.