Linear motor, stage apparatus, and exposure apparatus

A method for fabricating a linear motor,

• wherein the linear motor comprises a coil unit disposed in a surrounding member and facing a flow passage of a liquid for regulating temperature, and at least a part of a surface of the coil unit being in contact with the liquid,
• the method comprising:
• providing the coil unit, the coil unit comprising a coil body, a mold layer that covers the coil body and retains a specific form thereof, and a liquid protection layer that covers the mold layer and is disposed on a surface of the mold layer and has liquid protection properties;
• providing a lead unit that leads a wiring of the coil body from the coil unit, the coil unit being installed separate from the flow passage of the liquid so that the lead unit has no contact with a liquid that flows through the passage;
• providing a sealing portion on the coil unit, the coil unit being in contact with the surrounding member, and bringing the wiring from the coil unit to an outside of the surrounding member via the sealing portion;
• and
• providing a wiring passing portion through which the wiring passes, on the sealing portion, in order to provide a sealing member at a periphery of the wiring passing portion and between the sealing portion and the surrounding member.

A device fabricating method comprising:

• holding a mask with a mask stage apparatus, the mask having been carried from an outside;
• holding a substrate with a substrate stage apparatus, the substrate having been carried from an outside;
• relatively moving the mask stage apparatus and the substrate stage apparatus;
• and
• irradiating the mask with an exposure light during the relative movement and projecting an image of a pattern formed on the mask onto the substrate,
• wherein the mask stage apparatus or the substrate stage apparatus has a linear motor as a drive apparatus for the relative movement, the linear motor having a coil unit, the coil unit disposed in a surrounding member and facing a flow passage of a liquid for regulating temperature, at least a part of a surface of the coil unit being in contact with the liquid,
• the coil unit comprises a coil body, a mold layer that covers the coil body and retains a specific form thereof, and a liquid protection layer that covers the mold layer and is disposed on a surface of the mold layer and has liquid protection properties,
• a lead unit leading a wiring of the coil body from the coil unit is installed separate from the flow passage of the liquid so that the lead unit has no contact with a liquid that flows through the passage, and wherein
• the coil unit has a sealing portion that is in contact with the surrounding member, the wiring extends from the coil unit toward an outside of the surrounding member via the sealing portion, and wherein
• a wiring passing portion through which the wiring passes is provided on the sealing portion, and
• a sealing member is provided at a periphery of the wiring passing portion and between the sealing portion and the surrounding member.

A linear motor comprising:

• a coil unit having (a) a coil body, (b) a mold layer that covers the coil body and (c) a liquid protection layer that has liquid protection properties with respect to the liquid and is disposed on a surface of the mold layer;
• a surrounding member having an internal space for accommodating the coil unit, while the coil unit is accommodated in the internal space, a flow passage for the liquid being formed between the surrounding member and the liquid protection layer;
• a lead portion provided on a part of the coil unit and connected to the surrounding member, the lead portion forming a space, which is isolated from the flow passage, between the part of the coil unit and the surrounding member;
• and
• a wiring connected to the coil body and led out to outside of the surrounding member via the space.

A method for fabricating a linear motor, the method comprising:

• providing a coil unit that has (a) a coil body, (b) a mold layer that covers the coil body and (c) a liquid protection layer, that has liquid protection properties with respect to liquid and that is disposed on a surface of the mold layer;
• disposing the coil unit in a surrounding member;
• forming a flow passage for the liquid between the surrounding member and the liquid protection layer of the coil unit;
• providing a lead portion on a part of the coil unit and connected to the surrounding member, the lead portion forming a space, which is isolated from the flow passage, between the part of the coil unit and the surrounding member;
• and
• providing a wiring leading out from the coil body to outside of the surrounding member via the space.

A linear motor comprising:

• a coil unit disposed in and surrounded by a surrounding member and facing a flow passage of a liquid regulating temperature, and at least a part of a surface of the coil unit being in contact with the liquid, wherein
• the coil unit comprises a coil body, a mold layer that covers the coil body and a liquid protection layer that covers the mold layer and is disposed on a surface of the mold layer and has liquid protection properties,
• a part of the coil unit is separated from the flow passage such that there is no contact with a liquid that flows through the flow passage, and a surface of the part of the coil unit is in contact with the surrounding member,
• a wiring passing portion through which a wiring of the coil body passes and extends toward an outside of the surrounding member, is provided on the surface of the part of the coil unit, and
• a sealing member is provided around a periphery of the wiring passing portion between the part of the coil unit and the surrounding member and in contact with the part of the coil unit and the surrounding member.

A method for fabricating a linear motor,

• wherein the linear motor comprises a coil unit disposed in and surrounded by a surrounding member and facing a flow passage of a liquid for regulating temperature, and at least a part of a surface of the coil unit being in contact with the liquid,
• the method comprising:
• providing the coil unit, the coil unit comprising a coil body, a mold layer that covers the coil body, and a liquid protection layer that covers the mold layer and is disposed on a surface of the mold layer and has liquid protection properties;
• separating a part of the coil unit from the flow passage so that the part of the coil unit has no contact with a liquid that flows through the passage;
• contacting a surface of the part of the coil unit with the surrounding member;
• providing a wiring passing portion through which a wiring of the coil body passes, on a surface of the part of the coil unit;
• and
• providing a sealing member around a periphery of the wiring passing portion and between the part of the coil unit and the surrounding member and in contact with the part of the coil unit and the surrounding member.