Optical component
AssigneeCarl Zeiss SMT GmbH
InventorsSeverin Waldis, Marco Jassmann, Caglar Ataman, Roger Marc Bostock, Jian Deng, Sebastian Lani, Benedikt Knauf
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Abstract
An optical component comprising a mirror array having a multiplicity of mirror elements, which each have at least one degree of freedom of displacement, and which are each connected to at least one actuator for displacement, has a multiplicity of local regulating devices for damping oscillations of the mirror elements, wherein each of the regulating devices in each case has at least one capacitive sensor having at least one moveable electrode and at least one electrode arranged rigidly relative to the carrying structure.
Claims20
An optical component, comprising:
- a mirror array comprising a multiplicity of mirror elements, each mirror element having at least one degree of freedom of displacement;
- a multiplicity of actuators, each actuator configured to displace an associated mirror element;
- a carrying structure mechanically connected to the mirror array;
- and
- a multiplicity of local regulating devices, each local regulating device configured to dampen oscillations of an associated mirror element,
- wherein:
- a totality of the mirror elements defines a parquet of a total reflection surface of the mirror array;
- the mirror array has a total surface extending perpendicular to a surface normal;
- the carrying structure projects beyond the total surface of the mirror array in a direction perpendicular to the surface normal by at most 5 mm;
- each local regulating device comprises a capacitive sensor;
- each capacitive sensor comprises:
- a moveable electrode in the form of an actuator pin;
- and
- an electrode arranged rigidly relative to the carrying structure;
- and
- for each capacitive sensor:
- the moveable electrode is a constituent part of the actuator for the associated mirror element;
- and
- the moveable electrode is electrically decoupled from its associated mirror element.
An optical component, comprising:
- a mirror array comprising a multiplicity of mirror elements, each mirror element having at least one degree of freedom of displacement;
- a multiplicity of actuators, each actuator configured to displace an associated mirror element;
- a carrying structure mechanically connected to the mirror array;
- and
- a multiplicity of local regulating devices, each local regulating device configured to dampen oscillations of an associated mirror element,
- wherein:
- a totality of the mirror elements defines a parquet of a total reflection surface of the mirror array;
- the mirror array has a total surface extending perpendicular to a surface normal;
- the carrying structure projects beyond the total surface of the mirror array in a direction perpendicular to the surface normal by at most 5 mm;
- each local regulating device comprises a capacitive sensor;
- each capacitive sensor comprises:
- a moveable electrode in the form of an actuator pin;
- and
- an electrode arranged rigidly relative to the carrying structure;
- and
- for at least one capacitive sensor:
- the moveable electrode is a constituent part of the actuator for the associated mirror element;
- and
- the moveable electrode is electrically decoupled from its associated mirror element.
Dependencies are inferred from the claim text.