Optical imaging arrangement with simplified manufacture

A method of supporting components of an optical imaging apparatus comprising an optical element support sub-structure and an auxiliary support sub-structure, the optical element support sub-structure configured to support an optical element defining part of a group of optical elements of the optical imaging apparatus configured to transfer an image of a pattern of a mask onto a substrate during an exposure process using exposure light, the auxiliary support sub-structure configured to support an auxiliary component configured to execute an auxiliary function of the exposure process other than transferring the image of the pattern onto the substrate during the exposure process, the method comprising:

• a) releasably connecting the auxiliary support sub-structure and the optical element support sub-structure using a temporary connecting device to temporarily support the auxiliary support sub-structure via the optical element support sub-structure;
• b) connecting the optical element support sub-structure to a further optical element support sub-structure to support the optical element support sub-structure, and connecting the auxiliary support sub-structure to a further auxiliary support sub-structure to support the auxiliary support sub-structure;
• and
• c) releasing the temporary connecting device to support the auxiliary component via the auxiliary support sub-structure in a manner mechanically decoupled from the optical element support sub-structure.