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US 9,804,465 B2Granted
Method for detecting defects of TFT array substrate
AssigneeShenzhen China Star Optoelectronics Technology Co., Ltd.
InventorsRi Hong, Kecheng Xie
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Abstract
Disclosed is a method for detecting defects of a TFT array substrate. The method comprises steps of: positioning an abnormal area of the TFT array substrate; separating the abnormal area from other areas of the array substrate; and treating the abnormal area as such that multiple layers in the abnormal area can be revealed one by one, and detecting the revealed layers to determine a defective layer in the abnormal area.
Claims14
A method for detecting defects of a TFT array substrate, comprising:
- positioning an abnormal area of the TFT array substrate,
- separating the abnormal area from other areas of the array substrate, and
- treating the abnormal area as such that multiple layers in the abnormal area can be revealed one by one, and detecting the revealed layers to determine a defective layer in the abnormal area.
Dependencies are inferred from the claim text.