Laser scanning system for laser release
AssigneeM-Solv Limited
InventorsDavid Charles Milne, Philip Thomas Rumsby
Life of this patent
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Abstract
The invention relates to a laser scanning system and associated method. In a disclosed arrangement the method comprises using a laser source to produce a laser beam; using a scanning module to scan the laser beam over the surface of a substrate; and using a redirecting unit at a position in a beam path of the laser beam between the scanning module and the substrate to control the direction of incidence of the laser beam onto the substrate, wherein: the laser beam is scanned over a predetermined region on the substrate in such a way that each portion of the region is exposed by the laser beam from a plurality of different directions of incidence.
Claims28
A laser scanning system for scanning a laser beam over the surface of a substrate, comprising:
- a laser source for producing a laser beam;
- a substrate table for supporting the substrate;
- a scanning module containing programmable optics for selectively redirecting the laser beam;
- a control module for controlling the scanning module to scan the laser beam over the surface of the substrate;
- and
- a redirecting unit at a position in a beam path of the laser beam between the scanning module and the substrate, the redirecting unit being configured to control the direction of incidence of the laser beam onto the substrate, wherein:
- the control module and redirecting unit are configured to scan the laser beam over a predetermined region on the substrate in such a way that each portion of the region is exposed by the laser beam from a plurality of different directions of incidence.
A method of scanning a laser beam over the surface of a substrate, comprising:
- using a laser source to produce a laser beam;
- using a scanning module to scan the laser beam over the surface of a substrate;
- and
- using a redirecting unit at a position in a beam path of the laser beam between the scanning module and the substrate to control the direction of incidence of the laser beam onto the substrate, wherein:
- the laser beam is scanned over a predetermined region on the substrate in such a way that each portion of the region is exposed by the laser beam from a plurality of different directions of incidence.
Dependencies are inferred from the claim text.