Device testing and monitoring method thereof
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJaw-Juinn Horng, Szu-Lin Liu, Jinn-Yeh Chien
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Abstract
Some embodiments of the present disclosure provide a method including turning on a noise-measuring system for a device under test (DUT) with the DUT turned off; measuring a first phase noise caused by the noise-measuring system; turning on the DUT; measuring a second phase noise caused by the noise-measuring system and the DUT; and subtracting the first phase noise from the second phase noise to obtain a third phase noise caused by the DUT.
Claims20
A method, comprising:
- turning on a noise-measuring system for a device under test (DUT) with the DUT turned off;
- measuring a first phase noise caused by the noise-measuring system;
- turning on the DUT;
- measuring a second phase noise caused by the noise-measuring system and the DUT;
- and
- subtracting the first phase noise from the second phase noise to obtain a third phase noise caused by the DUT.
A system for obtaining a phase noise caused by a device under test (DUT), comprising:
- a noise-measuring system configured to measure the phase noise caused by the DUT;
- and
- a controller configured to:
- turn on the noise-measuring system with the DUT turned off to cause the noise-measuring system to measure a first phase noise caused by the noise-measuring system, and
- turn on the DUT to cause the noise-measuring system to measure a second phase noise caused by the noise-measuring system and the DUT, and subtract the first phase noise from the second phase noise to obtain the phase noise caused by the DUT.
A method, comprising:
- turning on a phase lock loop (PLL) and a phase subtractor for measuring a phase noise of a device under test (DUT), and not turning on the DUT;
- the PLL measuring a first phase noise caused by the PLL;
- turning on the DUT;
- the PLL measuring a second phase noise caused by the PLL and the DUT;
- and
- the phase subtractor subtracting the first phase noise from the second phase noise to obtain the phase noise caused by the DUT.
Dependencies are inferred from the claim text.