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US 9,804,197 B2Granted
Evaluation apparatus and probe position inspection method
AssigneeMitsubishi Electric Corporation
InventorsNorihiro Takesako, Akira Okada, Takaya Noguchi
Life of this patent
Estimating the term…
Abstract
A probe position inspection apparatus which incorporates a rotatable internal prism is attached to a supporting unit for supporting semiconductor device, thus making it possible to accurately inspect in-plane positions of tips of probes in a short time and also making it possible to adapt the probe position inspection apparatus to a double-sided prober.
Claims17
An evaluation apparatus comprising:
- a supporting unit configured to fix a semiconductor device in place and cause an upper surface and a lower surface of the semiconductor device to be exposed;
- a first insulating plate provided above the supporting unit;
- a second insulating plate provided below the supporting unit;
- a plurality of first probes fixed to the first insulating plate;
- a plurality of second probes fixed to the second insulating plate;
- and
- a probe position inspection apparatus attached to the supporting unit,
- wherein the probe position inspection apparatus comprises:
- a casing including a first transparent member on a side of the first insulating plate and a second transparent member on a side of the second insulating plate;
- an internal prism provided in the casing;
- a prism rotating unit for rotating the internal prism in the casing;
- and
- an imaging unit provided outside the casing to take an image of any of the plurality of first probes contacting the first transparent member and the plurality of second probes contacting the second transparent member through the internal prism.
10 more elements
An evaluation apparatus comprising:
- a supporting unit configured to fix a semiconductor device in place and cause an upper surface and a lower surface of the semiconductor device to be exposed;
- a first insulating plate provided above the supporting unit;
- a second insulating plate provided below the supporting unit;
- a plurality of first probes fixed to the first insulating plate;
- a plurality of second probes fixed to the second insulating plate;
- and
- a probe position inspection apparatus attached to the supporting unit,
- wherein the probe position inspection apparatus comprises:
- a casing including a transparent member on any one of a side of the first insulating plate and a side of the second insulating plate;
- an internal prism provided in the casing;
- a casing rotating unit for rotating the casing;
- and
- an imaging unit provided outside the casing to take an image of any of the plurality of first probes and the plurality of second probes contacting the transparent member through the internal prism.
10 more elements
A probe position inspection method comprising:
- a first contact step of bringing a plurality of first probes into contact with a first transparent member of a probe position inspection apparatus, the plurality of first probes being located above the first transparent member, the probe position inspection apparatus comprising a casing and an internal prism provided inside the casing, the casing comprising the first transparent member and a second transparent member facing the first transparent member;
- a first imaging step of taking an image of the plurality of first probes through the first transparent member and the internal prism with an imaging unit;
- a prism rotating step of rotating the internal prism without rotating the casing;
- a second contact step of bringing a plurality of second probes located below the second transparent member into contact with the second transparent member;
- a second imaging step of taking an image of the plurality of second probes through the second transparent member and the internal prism with the imaging unit;
- and
- a determination step of making a determination based on the images taken with the imaging unit as to any one of whether positions of the plurality of first probes and the plurality of second probes are at predetermined positions or not and whether relative positions between the plurality of first probes and the plurality of second probes are predetermined ones or not,
- wherein the probe position inspection apparatus is attached to a supporting unit for supporting a semiconductor device.
5 more elements
A probe position inspection method comprising:
- a first contact step of bringing a plurality of first probes into contact with a transparent member of a probe position inspection apparatus, the plurality of first probes being located above the transparent member, the probe position inspection apparatus comprising a casing and an internal prism provided inside the casing, the casing comprising the transparent member;
- a first imaging step of taking an image of the plurality of first probes through the transparent member and the internal prism with an imaging unit;
- a casing rotating step of rotating the casing together with the internal prism;
- a second contact step of bringing a plurality of second probes located below the transparent member into contact with the transparent member;
- a second imaging step of taking an image of the plurality of second probes through the transparent member and the internal prism with the imaging unit;
- and
- a determination step of making a determination based on the images taken with the imaging unit as to any one of whether positions of the plurality of first probes and the plurality of second probes are at predetermined positions or not and whether relative positions between the plurality of first probes and the plurality of second probes are predetermined ones or not,
- wherein the probe position inspection apparatus is attached to a supporting unit for supporting a semiconductor device.
5 more elements
Dependencies are inferred from the claim text.