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US 9,804,190 B2Granted
Apparatus and method for calibration of capacitance mismatch and temperature variations in a MEMS device
AssigneePanasonic Corporation
InventorsYaesuk Jeong, Farrokh Ayazi
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Abstract
A system and calibration method utilizes time averaging to suppress inherent capacitance mismatches or temperature variations in MEMS devices, such as a tri-axial accelerometer. An calibration interface circuit, operatively coupled the MEMS sensor, effectively cancels a range of non-ideal capacitive mismatches by employing pockets of calibration charges that are controlled by the duty-cycle of a clock.
Claims6
A method for calibrating a sensor comprising:
- A) receiving a sensor output signal into an signal amplification signal path;
- B) introducing into the signal amplification path a first calibration signal during a first time period;
- C) introducing into the signal amplification path a second calibration signal during a second time period different from the first time period;
- and
- D) generating a processed output signal representing an average of signals within the signal amplification path.
2 more elements
Dependencies are inferred from the claim text.