Inertial sensor
AssigneeHitachi Automotive Systems, Ltd.
InventorsHeewon Jeong, Kiyoko Yamanaka, Masahide Hayashi
Life of this patent
Estimating the term…
Abstract
An inertial sensor not susceptible to temperature change and vibration disturbance in an implementation environment of the inertial sensor is provided. In the present invention, for example, as illustrated in FIG. 9, an extending portion EXU is provided so as to connect to a fixing portion FU3, this extending portion EXU and a third region P3 which configures part of a mass body MS are connected via a support beam BM3 and a support beam BM4, and the support beam BM3 and the support beam BM4 are disposed oppositely with respect to a virtual line IL1. With this, natural frequency of an unwanted mode due to rotation and torsion of the mass body MS can be shifted to a high frequency band.
Claims14
An inertial sensor comprising:
- (a) a mass body including a first region extending in a first direction, a second region extending in the first direction as being away by a predetermined distance from the first region in a second direction orthogonal to the first direction, and a third region extending in the second direction so as to be coupled to the first region and the second region, the mass body being displaceable in the first direction;
- (b) a first fixing portion connected to the first region via a first support beam;
- (c) a second fixing portion connected to the second region via a second support beam;
- (d) a third fixing portion;
- (e) an extending portion connected to the third fixing portion and extending in the second direction;
- (f) a third support beam connecting the extending portion and the third region;
- and
- (g) a fourth support beam connecting the extending portion and the third region,
- wherein the third support beam and the fourth support beam are disposed oppositely to each other with respect to a virtual line passing through the third fixing portion and extending in the first direction.
Dependencies are inferred from the claim text.