Method of manufacturing a pressure sensor
AssigneeKidde Technologies, Inc.
InventorsPaul Rennie, Paul D. Smith
Life of this patent
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Abstract
A method of manufacturing an overheat or fire alarm detection system, comprises the steps of micromachining a pressure sensor and securing a sensor tube in fluid communication with the pressure sensor. The sensor tube may comprise a hollow tube containing a material that evolves gas upon heating. The micromachining step may comprise doping at least a portion of a first layer, forming a cavity at least partially within the doped portion and forming a deformable diaphragm over the cavity.
Claims7
A method of manufacturing an overheat or fire alarm detection system, comprising the steps of:
- micromachining a pressure sensor, and
- securing a sensor tube in fluid communication with said pressure sensor;
- wherein said micromachining step comprises:
- forming one or more layers including a first layer,
- doping at least a portion of a first layer to form a doped portion;
- to form an electrical terminal,
- forming a cavity at least partially within said doped portion;
- and
- forming a deformable diaphragm over said cavity,
- wherein said micromachining step comprises forming a recess in an upper surface of said diaphragm, said upper surface facing away from said first layer and being at least partially aligned with said cavity, and
- wherein said micromachining step comprises forming at least two recesses having different depths.
A pneumatic pressure sensor comprising:
- a first layer having a plurality of cavities in a first surface;
- and
- a deformable diaphragm having:
- a first surface facing and covering said cavities, and
- a second surface facing away from said first layer and having a plurality of recesses, wherein each recess is at least partially aligned with one of said cavities and at least a first recess has a greater depth than a second recess;
- wherein said first layer comprises a semiconductor wafer having a plurality of doped portions and one or more of said cavities is at least partially within one of said doped portions;
- and
- wherein each doped portion provides an electrical terminal that is closable by the movement of a portion of said diaphragm into one of the plurality of cavities.
Dependencies are inferred from the claim text.