Power damper, laser power meter, laser power measurement method, and laser power monitoring system
AssigneeMitsubishi Electric Corporation
InventorsMasahiko Hasegawa, Yasunari Matsumoto
Life of this patent
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Abstract
A laser power meter according to the invention is configured to have a power damper including a laser receiving body that receives a laser beam on an inner surface thereof and converts laser power into heat, a case that forms a channel between the case and an outer surface of the laser receiving body, a heat insulation member between the laser receiving body and the case, and temperature measurement means for measuring a heat quantity absorbed by the laser receiving body; and conversion means for converting a signal of the temperature measurement means into an output value for a laser beam.
Claims9
A power damper comprising:
- a laser receiving body that receives a laser beam from a laser oscillator on an inner surface thereof and converts laser power into heat;
- a case that is attached to the laser receiving body so as to surround an outer surface of the laser receiving body and forms a channel of a coolant between the case and the outer surface of the laser receiving body;
- an inflow hole and an outflow hole respectively leading to and from the channel provided in the case;
- a heat insulation member that thermally isolates the laser receiving body and the case from each other in an attachment portion of the laser receiving body and the case;
- and
- temperature measurement means for measuring a temperature of the laser receiving body,
- wherein the temperature measurement means includes a first temperature sensor installed in a vicinity of the attachment portion attached to the case, on an inner surface of the laser receiving body.
Dependencies are inferred from the claim text.