Sapphire sensor for measuring pressure and temperature
AssigneeSentek Instrument LLC
InventorsBo Dong, Anbo Wang
Life of this patent
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Abstract
A sensor for measuring pressure, temperature or both may be provided. The sensor may include a diaphragm that may respond to a change in temperature or pressure, a base connected to the diaphragm, a cavity, and an optical fiber that may conduct light reflected off of a surface of the diaphragm. The diaphragm and base may be sapphire elements. An interrogator may be provided for detecting a deflection of the diaphragm.
Claims44
A sensor apparatus for measuring a pressure, a temperature, or both, the sensor comprising:
- a diaphragm configured to respond to a change in temperature or pressure, the diaphragm comprising at least one sapphire element;
- a base comprising at least one sapphire element;
- a cavity defined between the diaphragm and the base by a sapphire spacer having a closed geometric shape and a thickness which is large relative to a thickness of said diaphragm, said diaphragm, said base and said sapphire spacer being bonded together;
- and
- an optical fiber that is configured to conduct light reflected off boundaries of said cavity while reducing reflection from an end surface of said optical fiber.
A system for measuring a pressure, a temperature, or both, the system comprising:
- a diaphragm configured to respond to a change in temperature or pressure, the diaphragm comprising at least one sapphire element;
- a base comprising at least one sapphire element;
- a cavity defined between the diaphragm and the base by a sapphire spacer having a closed geometric shape and a thickness which is large relative to a thickness of said diaphragm, said diaphragm, said base and said sapphire spacer being bonded together;
- an optical fiber that is configured to conduct light reflected off of a surface of the diaphragm and a boundary of said cavity;
- and
- an interrogator for detecting a deflection and an OPD of the diaphragm, or the base, respectively.
A sensor apparatus for measuring a pressure, a temperature, or both, the sensor comprising:
- a diaphragm configured to respond to a change in temperature or pressure, the diaphragm comprising at least one sapphire element;
- a base connected to the diaphragm, the base comprising at least one sapphire element;
- a cavity defined between the diaphragm and the optical fiber by a sapphire spacer having a thickness which is large relative to a thickness of said diaphragm, and
- an optical fiber configured to conduct light reflected off a surface of said diaphragm or boundary of said cavity.
Dependencies are inferred from the claim text.