Systems and methods for a time-based optical pickoff for MEMS sensors

An integrated optical read out sensor, the sensor comprising:

• at least a first glass substrate;
• an integrated waveguide evanescent optical-pickoff monolithically fabricated within the first glass substrate and comprising an optical input port, a coupling port coupled to the optical input port by a first waveguide, and an optical output port coupled to the coupling port by a second waveguide;
• a moving sensor component adjacent to the coupling port and having a degree-of-freedom of in-plane motion with respect to the coupling port of the integrated waveguide evanescent optical-pickoff, wherein the coupling port is positioned relative to an edge of the moving sensor component such that an area of overlap between the coupling port and the moving sensor component changes with the in-plane motion of the moving sensor component, wherein the coupling port is located within the first glass substrate and comprises a portion of the monolithically fabricated integrated waveguide that approaches a surface of the first substrate adjacent to the moving sensor component;
• a light source that launches light into the first glass substrate via the optical input port, wherein a portion of the light couples from the coupling port to the moving sensor component as a function of the area of overlap between the coupling port and the moving sensor component;
• at least one photodetector coupled to the optical output port;
• and
• electronics, coupled to the at least one photodetector, that calculate a measurement based on a modulation of the light exiting from the optical output port, wherein the modulation is at least in part a function of the area of overlap between the coupling port and the moving sensor component.