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US 9,803,292 B2Granted
Barrier guided growth of microstructured and nanostructured graphene and graphite
AssigneeWisconsin Alumni Research Foundation
InventorsMichael S. Arnold, Padma Gopalan, Nathaniel S. Safron, Myungwoong Kim
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Abstract
Methods for growing microstructured and nanostructured graphene by growing the microstructured and nanostructured graphene from the bottom-up directly in the desired pattern are provided. The graphene structures can be grown via chemical vapor deposition (CVD) on substrates that are partially covered by a patterned graphene growth barrier which guides the growth of the graphene.
Claims10
A method for growing multilayered patterned, single-crystalline graphene comprising:
- depositing a graphene growth barrier that defines a pattern directly on a graphene growth catalyst surface;
- and growing multiple sheets of graphene in a vertical stack directly on the graphene growth catalyst surface, wherein the graphene sheets are grown directly, laterally next to and around the graphene growth barrier and the vertical stack of graphene is grown to a height that exceeds a height of the graphene growth barrier;
- and further wherein each new sheet of graphene in the vertical stack forms at the bottom of the vertical stack and the sheets of graphene that are at a height that exceeds the height of the graphene growth barrier do not grow laterally, whereby a same pattern that is defined by the graphene growth barrier is also defined in all of the sheets of graphene in the stack.
Dependencies are inferred from the claim text.